Home » Laser Microfabrication: Thin Film Processes and Lithography by Daniel J. Ehrlich
Laser Microfabrication: Thin Film Processes and Lithography Daniel J. Ehrlich

Laser Microfabrication: Thin Film Processes and Lithography

Daniel J. Ehrlich

Published June 1st 1989
ISBN : 9780122334306
Hardcover
587 pages
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 About the Book 

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essentialMoreThis book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.